High- dielectric

Results: 130



#Item
21Ceramic materials / Atomic physics / Molecular physics / Spectroscopy / X-ray photoelectron spectroscopy / Silicon dioxide / Oxide / High-k dielectric / Silicide / Chemistry / Matter / Anions

Photon Factory Activity Report 2009 #27 Part BSurface and Interface 18A/2008G186 Effect of oxygen coadsorption on titanium silicide formation on Si(001)

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-12-27 22:22:08
22Annealing / Silicide / Photoemission spectroscopy / Chemistry / Physics / Electrical engineering / Electronic engineering / High-k dielectric / Transistors

Surface and Interface 2C/2002S2-002 Chemical reaction and metallic cluster formation by annealing-temperature control in ZrO2 gate insulator on Si

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-01-05 10:30:04
23Electronic engineering / Semiconductor device fabrication / Atomic physics / Electromagnetism / Photoemission spectroscopy / High-k dielectric / Titanium nitride / Spectroscopy / Core electron / Physics / Chemistry / Emission spectroscopy

Photon Factory Activity Report 2010 #28 Part BSurface and Interface 2C/2008S2-003 Effect of nitrogen bonding states on dipole at the HfSiO/SiON interface studied by

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Source URL: pfwww.kek.jp

Language: English - Date: 2012-01-30 04:32:45
24Emission spectroscopy / Photoemission spectroscopy / Atomic physics / High-k dielectric / Core electron / Electron / Physics / Chemistry / Spectroscopy

Photon Factory Activity Report 2006 #24 Part BSurface and Interface 2C/2005S2-002 Analysis of x-ray irradiation effect in high-k gate dielectrics by time-dependent

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-01-05 10:33:37
25Ceramic materials / Superhard materials / Nitrides / Silicon nitride / High-k dielectric / Silicon / Light-emitting diode / Chemistry / Matter / Materials science

E:書エ研告書 ctivityeportEnglish4.doc

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Source URL: pfwww.kek.jp

Language: English - Date: 2013-09-26 20:31:32
26Transistors / Silicon dioxide / Ultra-high vacuum / MOSFET / Gallium nitride / Annealing / Chemistry / Electronic engineering / High-k dielectric

Photon Factory Activity Report 2006 #24 Part BChemistry 2C/2005S2-002 Thermal decomposition of LaAlO3/SiO2/Si gate stack structures studied by

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-01-05 10:34:17
27High-k dielectric / Transistors / Physics / Photoemission spectroscopy / Chemistry / Angle-resolved photoemission spectroscopy / Annealing / Layer / Materials science / Emission spectroscopy / Semiconductor device fabrication / Electronic engineering

Photon Factory Activity Report 2008 #26 Part BSurface and Interface 2C/2008S2-003 In-depth profiles of Hf-based gate insulator films on Si substrates studied by angle-resolved photoemission spectroscopy

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-01-05 10:36:04
28Spectroscopy / Emission spectroscopy / Annealing / Silicide / Polycrystalline silicon / Photoemission spectroscopy / High-k dielectric / Absorption spectroscopy / Core electron / Chemistry / Physics / Science

Photon Factory Activity Report 2006 #24 Part BSurface and Interface 2C/2005S2-002 Suppression of silicidation and crystallization by atmosphere controlled annealing

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-01-05 10:33:38
29Thin film deposition / Electronic engineering / High-k dielectric / Transistors / Ceramic materials / Gate dielectric / Atomic layer deposition / Annealing / Equivalent oxide thickness / Chemistry / Materials science / Electromagnetism

Photon Factory Activity Report 2008 #26 Part BSurface and Interface 2C/2005S2-002 Control of oxidation and reduction in HfSiON/Si through N2 exposure Hiroyuki KAMADA*1, Tatsuhiko TANIMURA1, Satoshi TOYODA1-3, Hir

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-01-05 10:36:03
30Semiconductor device fabrication / Superhard materials / Transistors / Ceramic materials / Atomic layer deposition / High-k dielectric / Ruthenium(IV) oxide / Silicon dioxide / Titanium nitride / Chemistry / Matter / Electronic engineering

Photon Factory Activity Report 2009 #27 Part BSurface and Interface 2C/2008S2003 Interfacial reactions for Ru metal-electrode/HfSiON gate stack structures studied

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Source URL: pfwww.kek.jp

Language: English - Date: 2010-12-27 22:22:07
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